The MEGA coating system (multi-source magnetron sputtering system) enables the production of new types of metallic or ceramic coatings in monolithic, graded or multi-layer arrangements using 7 ...
High power magnetron sputtering techniques have become essential tools in the deposition of advanced thin films. By utilising high power pulses, these methods generate highly ionised plasmas that ...
Innovative RF-magnetron sputtering process creates homogenous BaTiO3 films for high-tech electronics
Microstructural characterization of BaTiO3 thin films prepared by RF-Magnetron sputtering using sintered targets from high energy ball milled powders The electronic and optical characteristics of ...
The confocal sputtering technique involves the arrangement of magnetrons inside a vacuum chamber so that it is possible to apply multiple materials onto the substrate without breaking vacuum. This ...
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