Optical 3D metrology enables fast, non-contact surface roughness measurement of defects and roughness for precise ...
In addition to surface and subsurface defects, residual stress represents a concern. Over time, these stress points, ...
“Launching a new Surfscan platform is an exciting event for KLA-Tencor,” said Ali Salehpour, senior vice president and general manager of the Surfscan / ADE division at KLA-Tencor. “The visible-light ...
Unpatterned wafer inspection, which has flown well under the radar for most of the semiconductor industry, is becoming more critical amid the need to find defects earlier in the manufacturing process ...
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