Recently, the complexity of semiconductor manufacturing processes has increased, resulting in a growing need for high-precision optimization of device structures. For example, in batch-type wet ...
Optimal Design of WET Etching Bath for 3D Flash Memories Using Multi-Objective Bayesian Optimization
Abstract: In recent years, the complexity of semiconductor manufacturing processes has increased, leading to a growing need for the high-precision optimization of device structures. For example, in ...
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